Micelle-controlled nanoparticle synthesis for SERS

ABSTRACT

The methods and apparatus disclosed herein concern nanoparticle layers uniformly distributed on a surface or substrate. In certain embodiments of the invention, the nanoparticle layers are of use for Raman spectroscopy. In certain embodiments of the invention, a micelle-metal ion complex is formed and deposited on a surface. The polymer component of the micelle-metal ion complex may be removed resulting in formation of nanoparticles of a uniform size and distribution. The polymers may contain one or more ligands. The number and type of ligands in a micelle will determine the type and amount of metal ion bound to the micelle, in turn determining the metal composition and size of the nanoparticles. The distribution micelle-metal ion complexes on a surface may determine the distribution and periodicity of the nanoparticle layer. In other embodiments, rod or columnar-shaped nanoparticles may be generated. Other embodiments concern the generation of uniform alloy nanoparticles.

FIELD

The present methods and apparatus relate to the field of analytedetection. In particular, analytes may be detected using Ramanspectroscopy on surfaces with a uniform layer of nanoparticles. Incertain embodiments of the invention, uniform nanoparticle layers may beformed using micelle-metal ion complexes.

BACKGROUND

The SERS (surface enhanced Raman spectroscopy) effect arises from anelectromagnetic enhancement of optical processes near noble metalsurfaces. The magnitude of the enhancement varies from metal to metaland depends on the surface preparation. Silver shows the largestenhancement, on the order of 10⁶ to 10⁷ increased Raman signal strength.

Previous SERS methods only work well for a limited class of analytemolecules. SERS sensors have been made for organic compounds, metalions, pH, and CO₂ detection with good sensitivity and selectivity. Aneed exists for methods to produce sensitive and selective Raman sensorsfor use with other types of analytes.

A problem with SERS technology has been the lack of reproducibility ofthe surfaces used for surface enhancement. In particular, thereproducible production of surfaces uniformly coated with metal or metalalloy nanoparticles has been difficult to achieve. The synthesis ofmetal colloids can be unpredictable, resulting in nanoparticles ofvarying sizes that make SERS detection unreliable. In addition, surfacechemistry has been limiting with respect to production of surfacescontaining multiple Raman-active metals. The generation of Ramansurfaces with even low levels of periodicity, allowing fine-tuning ofsurfaces for detecting different analytes, has been expensive toscale-up.

Recent advances in electron-beam, ion-beam, and scanning probelithography techniques have pushed the minimum size of microfabricatedstructures below the 100 nm scale. However, generation of homogeneousnanoparticle layers has not progressed equivalently. A reliable andreproducible method is needed to generate uniform nanoparticle surfacesfor use in Raman spectroscopy. Such uniform nanoparticle surfaces couldbe used in combination with microfabricated structures to provide thesurfaces for the sensitive and reliable detection of a wide range ofanalytes.

BRIEF DESCRIPTION OF THE DRAWINGS

The following drawings form part of the present specific metal ion andare included to further demonstrate certain aspects of the disclosedembodiments of the invention. The embodiments may be better understoodby reference to one or more of these drawings in combination with thedetailed description of specific embodiments presented herein.

FIG. 1 illustrates an exemplary method for generating a uniform layer ofnanoparticles 150 on a surface 135.

FIG. 2 illustrates an exemplary method for generating a uniform rod orpillar-shaped nanoparticle surface 260.

FIG. 3 illustrates an exemplary method for generating a uniform layer ofalloy nanoparticles 350.

FIG. 4 illustrates a SERS signal from Adenine Analyte and Aunanoparticles.

DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

The following detailed description contains numerous details in order toprovide a thorough understanding of the disclosed embodiments of theinvention. However, it will be apparent to those skilled in the art thatthe embodiments may be practiced without these specific details. Inother instances, devices, methods, procedures, and individual componentsthat are well known in the art have not been described in detail herein.

Definitions

A “block polymer” is a polymer whose molecules consist of blocks thatare linearly connected together. The blocks may be connected directly orthrough a linking unit that is not part of the blocks. The individualblocks that form a polymer molecule may be identical (homopolymer) ormay be different (heteropolymer). Heteropolymers may comprise, forexample, some blocks that are charged (e.g., anionic) and some blocksthat are uncharged. Heteropolymers may also comprise some blocks thatare hydrophobic and some that are hydrophilic in nature. Where micellesare to be exposed to a nonpolar solution, the constituent heteropolymersmay contain hydrophobic outer blocks and hydrophilic or charged innerblocks.

As used herein, “a” or “an” may mean one or more than one of an item.

As used herein, an “analyte” may refer to any atom, chemical, molecule,compound, composition or aggregate of interest for detection and/oridentification. Non-limiting examples of analytes include an amino acid,peptide, polypeptide, protein, glycoprotein, lipoprotein, nucleoside,nucleotide, oligonucleotide, nucleic acid, sugar, carbohydrate,oligosaccharide, polysaccharide, fatty acid, lipid, hormone, metabolite,cytokine, chemokine, receptor, neurotransmitter, antigen, allergen,antibody, substrate, metabolite, cofactor, inhibitor, drug,pharmaceutical, nutrient, prion, toxin, poison, explosive, pesticide,chemical warfare agent, biohazardous agent, radioisotope, vitamin,heterocyclic aromatic compound, carcinogen, mutagen, narcotic,amphetamine, barbiturate, hallucinogen, waste product and/orcontaminant. In certain embodiments of the invention, one or moreanalytes may be labeled with one or more Raman labels.

Uniform Nanoparticle Layers

Certain embodiments of the invention concern methods for generatinguniform nanoparticle layers 150 from micelle-metal ion complexes 130(FIG. 1). The micelles 120 may be formed from block polymer moleculeswith an outer block 105 and incorporating one or more ligands 110. Theligands 110 can bind to a pre-determined number of metal ions 125 foreach micelle-metal ion complex 130, controlling the size and compositionof the nanoparticles 150 formed. In particular embodiments, a layer ofspherical nanoparticles 150 that exhibit uniform size and periodicitymay be produced. Advantages over the known methods of nanoparticle 150production include the ability to generate a nanoparticle layer 150 witha precise periodicity for use in Raman detection methods.

As shown in FIG. 1, block polymers 105 comprising ligands 110 may beused to generate a micelle 120, for example by self-assembly afterexposure to a non-polar solution 115. The micelle 120 may be combinedwith one or more metal ions 125 to generate a micelle-metal ion complex130. In certain embodiments, the micelle-metal ion complexes 130 arelayered on a surface 135 and then the polymer molecules 105, 110 aredestroyed, for example by hydrogen plasma 145. At the same time, themetal ions are reduced to solid metal to form nanoparticles 150. Becausethe number of metal ions incorporated into each nanoparticle 150 may becontrolled by the size of the micelles 120 and the density of ligands110 attached to the polymer molecules 105, the result is a uniform layerof nanoparticles 150 deposited on the surface. In some embodiments, theuniform nanoparticle layer 150 may be used for Raman detection 155.

In other embodiments of the invention (FIG. 2), the disclosed methodsmay be used to generate a uniform surface of rod or pillar-shapednanoparticles 260. The nanoparticles 260 may be of uniform size, heightand periodicity. In some embodiments, the rod or pillar-shapednanoparticles 260 may be formed using a bilayered substrate 240,comprising a first surface 235 and a second surface 270. The top (first)surface 235 may be of a predetermined thickness to allow generation ofrods or pillars 260 of a selected height. In various embodiments, thefirst surface 235 may comprise a Raman active metal, such as silver(Ag), gold (Au), platinum (Pt), aluminum (Al) or copper (Cu).

A uniform layer of nanoparticles 250 may be deposited on top of thefirst surface 235. The nanoparticle layer 250 may be comprised of anon-reactive metal, such as gold. Reactive ion etching (RIE) 255 orother etching techniques known in the art may be used to etch the firstsurface 235 around the gold nanoparticles 250. Using RIE 255, the areasof the first surface 235 underlying the gold nanoparticles 250 remainintact, while the remaining areas are etched down to the lower (second)surface 270. Such methods may be used to generate a uniform roughsurface 260 of use for Raman detection. The surface 260 may be analyzedby TEM (transmission electron microscopy) or SEM (scanning electronmicroscopy) to confirm the dimensions and periodicity of thenanoparticles 260. An advantage to using micelle-controlled synthesis ofa uniform nanoparticle layer 250 with semi-conductor manufacturingprocesses (i.e. hydrogen plasma treatment 245 and RIE 255) is that itprovides a cheap, controllable, and scalable process for generatingRaman substrates 260 of use with a wide variety of analytes.

As shown in FIG. 2, block polymers 205 incorporating ligands 210 areused to generate a micelle 220, for example by self-assembly afterexposure to a non-polar solution 215. The micelle 220 may be combinedwith one or more metal ions 225 to generate micelle-metal ion complexes230. The micelle-metal ion complexes 230 may be layered on top of afirst surface 235 that overlies a second surface 270, to form amicelle-metal ion complex layer 230 on top of a bilayered substrate 240.The polymer molecules 205, 210 may be destroyed, for example by hydrogenplasma treatment 245 to form a nanoparticle layer 250 on top of thefirst surface 235. The bilayered substrate 240 and attachednanoparticles 250 may be exposed to an etching process 255, such as RIE.The etching process 255 removes the areas of the first surface 235around the gold nanoparticles 250, leaving a uniform substrate comprisedof pillar or rod-shaped composite nanoparticles 260. In variousembodiments of the invention, the pillar or rod-shaped nanoparticles 260form a Raman active substrate with a uniform height, size andperiodicity. Such substrates 260 may be used for Raman detection ofanalytes 265.

The disclosed methods may also be used to make alloy nanoparticles 350with fixed element ratios, size and distribution (FIG. 3). For example,block polymer molecules 305 may be designed to contain two or moredifferent ligands 310, 360, such as crown ethers. The resultingheteropolymer 305, 310, 360 will bind two or more different metal ions325, for example [AuCl₄]⁻. After deposition and reduction 345, alloynanoparticles 350 with a fixed element ratio will form. Suchnanoparticles 350 may be used as a SERS substrate 355 or as catalystsfor various chemical reactions 355. For example, Au/Pd alloynanoparticles 350 may be used as alkene hydrogenation catalysts 355,Cu—Pd alloy particles may be used as catalyst for Suzuki couplingreaction (Thathagar et al, J. of Am. Chem. Soc, 124, 2002,p11858-11859). Pd—Rh alloy particles may be used as hydrogen oxidationcatalyst for fuel cells (Christoffersen, et al, Journal of Catalysis199, 2001, p 123-131). The ratios of the metal ions of the alloy willvary depending on the reaction. For example, A Pd—Ru alloy may rangefrom a ratio of 150:1, 100:1, 50:5, 10,1 etc depending on the reaction.In a preferred embodiment of the invention, a Pd—Ru alloy of about 85:15ratio may be used for methanol oxidation. (Hoster et al, Phys. Chem.Chem. Phys., 2001, p 137-346).

The size of the alloy nanoparticles 350 may be controlled by the amountof metal ion 325 bound to each micelle 320. Metal ion binding 325 may inturn be determined by controlling the size of the micelle 320 and thedensity of ligands 310, 360 in the micelle 320. The average distancebetween nanoparticles 350 may be determined by the size of the micelles320. In addition, several different types of metallic nanostructures maybe used for SERS (see Table 1).

As shown in FIG. 3, nanoparticles 350 may be generated using two or moredifferent metal ions 325 bound to each micelle 320. Block polymers 305incorporating at least two different types of ligand 310, 360 may beused to generate a micelle 320, for example by self-assembly afterexposure to a non-polar solution 315. The micelle 320 may be combinedwith at least two different types of metal ion 325 to generatemicelle-mixed metal ion complexes 330. The micelle-mixed metal ioncomplexes 330 may be layered on top of a surface 335 and the polymermolecules 305, 310, 360 destroyed, for example by hydrogen plasmatreatment 345. This results in the production of metal alloynanoparticles 350 comprising two or more different metals. Because theratio of metals in the alloy may be controlled by the density of eachtype of ligand 360 in the micelle 320, the alloy nanoparticles 350 maybe designed to contain any ratio of two or more metals. Thus, where thealloy nanoparticle substrate 350 is used for Raman detection, the alloycomposition may be precisely controlled to optimize the Ramanspectroscopic properties for each type of analyte to be detected.

In alternative embodiments of the invention, the alloy nanoparticlesubtrate 350 may be used as a catalyst for a reaction 355, for exampleusing mixed gold/platinum nanoparticles 350 as an alkene hydrogenationcatalyst 355.

In various embodiments of the invention, the nanoparticle substrates150, 250, 260, 350 may be used to determine the optimal height,periodicity, size or metal alloy composition of nanoparticles 150, 250,260, 350, to be used for a given Raman spectroscopy procedure. It isexpected that the optimal nanoparticle substrate 150, 250, 260, 350characteristics will vary, depending on the Raman modality used, thetype of analytes to be detected, and the characteristics of the sampleor medium to be analyzed. For example, where very large analytes, suchas bacteria, virus or other pathogens are to be identified, theperiodicity of the nanoparticle substrate 150, 250, 260, 350 may beincreased to allow the analytes to penetrate the nanoparticle layer 150,250, 260, 350. A close juxtaposition between nanoparticles 150, 250,260, 350 and analytes will generally result in a larger enhancement ofsurface-enhanced Raman signals.

Micelles

In various embodiments of the invention, micelles may serve amultiplicity of purposes for formation of uniform nanoparticle layers.In some embodiments, micelles may be used to control the distribution,periodicity, density and composition of nanoparticles deposited on asurface. Micelle structure will itself be determined, in large part, bythe types and compositions of polymer molecules used to form the micelleand the solvent environment of the micelle. As described above,heteropolymeric molecules may be obtained, in which the outer blocks ofthe polymer are relatively hydrophobic in nature and the inner blocksare hydrophilic. When placed in a non-polar solvent, the polymermolecules will spontaneously self-assemble into micelles, with thehydrophobic blocks on the outer surface of the micelle and hydrophilicblocks inside. The hydrophilic interiors of the micelles create anaqueous environment that selectively partitions in charged or polarspecies, such as metal metal ions.

The hydrophilic blocks may contain one or more attached ligands. Theligands may bind to specific metal ions. As discussed further below, thetype of ligand attached to the polymer molecule will determine whichmetal ions can bind to the micelle, while the density of ligands in themicelle and the size of the micelle will determine how many metal ionsare bound per micelle. A uniform distribution of micelle size and liganddensity will result in uniformity of the number of metal ions in eachmicelle. The number of metal ions per micelle will in turn determine thedistribution of the metal nanoparticles that form when metal ions arereduced. Thus, use of very homogeneous micelle-metal ion complexes willresult in formation of a homogeneous size population of metalnanoparticles, with generally one nanoparticle formed per micelle. Thedistribution of nanoparticles on a surface will vary as a function ofthe size, structure and density of micelles in the non-polar solvent andthe method of depositing micelles on the surface. A maximum nanoparticledensity will be achieved where the micelles are packed on the surface ina contiguous array (i.e., touching). Such factors may be strictlycontrolled to produce a precisely distributed layer of nanoparticles ona surface. In certain embodiments, the micelles may form hexagonalarrays on the substrate surface, resulting in a hexagonal pattern ofdeposited nanoparticles. The nanoparticles formed by micelle techniquesmay range in size from about 1 nm to about 200 nm in diameter.

Exemplary heteropolymers that may be used to provide micelles include,but are not limited to, polystyrene-poly(4-vinylpyridine);polystyrene-poly(2-vinylpyridine); polystyrene-poly(4-vinylphenol);poly(4-vinylpyridine-co-butyl methacrylate); poly(styrene-co-maleicacid); and poly(vinyl chloride-co-vinyl acetate-co-maleic acid). Anotherexemplary heteropolymer that may be used is poly(N-vinyl-2-pyrrolidone)and poly(D,L-lactide) (PVP-b-PDLLA). The heteropolymer may besynthesized by ring-opening polymerization of D,L-lactide, initiated bypotassium PVP hydroxylate or other known techniques. PVP-b-PDLLA iscapable of self-assembling into polymeric micelles with multiple bindingsites and has high entrapment efficiency.

Self-assembling heteropolymers incorporating blocks of differentpolarity have been used to make micelles (Haupt, et.al. J. of AppliedPhysics, 91, p 6057-6059). The heteropolymers may be dissolved innon-polar solvents, for example toluene (C₆H₅CH₃), benzene (C₆H₆),carbon tetrachloride (CCl₄) or diethyl ether (CH₃CH₂OCH₂CH₃). Theheteropolymers spontaneously arrange themselves into micelles in suchsolvents, due to the tendency of the heteropolymers to arrangethemselves so as to minimize the exposure of hydrophilic blocks to thenon-polar solvent. Such methods of micelle formation are analogous tothe well-known tendency of biological lipids, such as phospholipids, toform micelles in aqueous solution. In the case of lipid micelles inwater, the polar head groups are oriented on the outside of the micelle,where they are exposed to the polar medium, while the hydrophobic tailsof the lipid molecules are located in the center of the micelle.

Production of iron nanoparticles using micelle-mediated reduction hasbeen reported (Su et al, J. Phy. Chem. B, 2000, 104:6505-6508; Li et al,Chem. Mater., 2001, 13:1008-1014). However, the nanoparticles that wereproduced were not arranged on a substrate surface in an ordered arrayand were not suitable for use with Raman spectroscopy. Earlier reportsalso did not control the ligand content of the polymer molecules toregulate the metal ion content of the micelles.

In the methods disclosed herein, the ligand content of the micelles maybe regulated by controlling the number and type of ligand blocks in theheteropolymer. The size of the micelles may be regulated by controllingthe heteropolymer size (molecular weight). The ligand content of themicelles will in turn determine the number and type of metal ions thatcan bind per micelle and the metal composition and size of thenanoparticles formed. The size of the micelles will affect both the sizeof the nanoparticles and the distribution of nanoparticles on thesubstrate. Methods of making block polymer molecules are known in theart (e.g. “Block Copolymers: Synthetic Strategies, Physical Properties,and Applications”, Nikos Hadjichristidis, Stergios Pispas, GeorgeFloudas) Block polymer molecules may also be obtained from commercialsources, such as Sigma-Aldrich Inc. and Polymer Source Inc.

In certain embodiments of the invention, the metal ion affinity of themicelles may be controlled by adjusting the ligand content of theheteropolymers. Different ligands exhibit different specificities andbinding affinities for different metal metal ions. The affinities ofdifferent types of ligands for various metal ions are well known in theart.

Micelle-metal ion complexes may be deposited on a surface, for exampleby dip coating or spin coating. In certain embodiments of the invention,micelle-metal ion complexes may be deposited on a silicon (Si) ormetal-coated silicon surface to form a mono-micellar film. In variousembodiments, the deposited mono-micellar film may be treated with anagent to remove the polymer molecules. For example, hydrogen-plasmatreatment will destroy and remove the polymer molecules, as well asreducing the metal ions to metal atoms. The final products are depositedas uniformly spaced nanoparticles on the substrate surface. In certainembodiments, spherical nanoparticles may be formed by depositingmicelle-metal ion complexes on an inert substrate, followed by polymerremoval and metal ion reduction.

In other embodiments of the invention, rod and/or pillar-shapednanoparticles may provide more optimal Raman spectroscopycharacteristics than spherical nanoparticles. Micelle-metal ioncomplexes may be deposited onto metal-coated substrates and reduced. Insuch cases, the metal coating may comprise a thin first surface ofsilver, platinum, aluminum or copper on top of a second, thicker surfaceof a standard chip substrate, for example silicon or aluminum. Afterreduction and deposit of, for example, gold nanoparticles on top of ametal first surface, the gold nanoparticles can be used as a maskprotecting the underlying first surface from etching by techniques suchas RIE (reactive ion etching), discussed below. RIE may be used toremove portions of the first surface that are not protected by goldnanoparticles, resulting in formation of rod or pillar-shapednanoparticles. The rods or pillars will contain, for example, acomposite of gold on top of the pillar and silver or other Raman-activemetal below. This method may be used to control the dimensions of thenanoparticle substrate, by regulating the size and distribution of goldnanoparticles on the first surface before etching, the thickness of thefirst surface and the time of exposure to RIE. The thickness of themetal first surface may range from about 10 to about 200 nm.

Hydrogen Plasma-Reactive Ion Etching

In some embodiments of the invention, hydrogen plasma treatment may beused to remove the polymer components of micelle-metal ion complexes(see, e.g., Haupt et al., 2002; Boyen et al., 2002). Hydrogen plasmatreatment does not leave any film that could interfere with the use ofthe nanoparticle substrate for Raman spectroscopy. In a non-limitingexample, a 15-minute exposure to hydrogen plasma at about 100 W and 1mbar of pressure may be used to remove polymer molecules and reducemetal ions to form metal nanoparticles.

In other embodiments of the invention, dry etching techniques such asRIE may be used to remove portions of a surface. In dry etching,reactive gas plasma is used in place of a wet etching solution. Dryetching provides a higher resolution than wet etching, with less“undercutting” of a masked substrate layer. Gaseous etching is generallyperformed with halogenated compounds that, depending on the substrate,may comprise bromine, chlorine, SiCl₄, sulfer hexafluoride SF₆ orcarbon-tetrafluoride CF₄-based gases in a carrier gas.

Plasma etching techniques are known for anisotropic removal of thin filmmaterials. Alternative systems for plasma etching include electroncyclotron resonance (ECR) and reactive ion etching (RIE). Such systemshave been routinely used to etch silicon chip substrates, such assilicon dioxide and silicon nitride. In RIE, the plasma form of a gas isused to chemically react with a solid-phase substrate to create volatileproducts. The products diffuse away, leaving an etched surface. In anon-limiting example, Ag—Si surfaces may be subjected to RIE etchingwith plasma-phase sulfur hexafluoride using, for example, a Plasma-ThermModel 720 RIE SLR system.

In one embodiment of the invention, nanoparticles may be used to form anetch mask on a substrate. The etch mask and substrate may be furthertreated to form a uniform, etched nanoparticle substrate layer. Inanother embodiment, the mask may be transferred to a substrate usinglow-energy reactive ion-etching (RIE). In another embodiment, the etchednanomask may be removed from the substrate with an aqueous solution(e.g. Na₂SO₄, H₂NCSNH₂).

In various embodiments of the invention, an etched metal-coatedsubstrate may comprise Au—Si, Ag—Si, Pt—Si, Cu—Si, Al—Si, Au—Al, Ag—Al,or Pt—Al. In certain embodiments, a metal-coated substrate may be Au—Sior Ag—Si. The block polymer structure and the thickness of a metal firstlayer may be adjusted to form various substrates of narrowly distributedmetal nanoparticles. The substrates may be screened in order to optimizethe conditions for detection of specific analytes. The substratestructures may be viewed by TEM (transmission electron microscopy)(e.g., Frankamp et al., J. Am. Chem. Soc. 124:892-893, 2002).

Raman Spectroscopy

Raman Detectors

In various embodiments of the invention, uniform nanoparticle layers ona surface or substrate may be used in conjunction with known Ramanspectroscopy techniques for a variety of applications, such asidentifying and/or quantifying one or more analytes in a sample. Methodsof Raman detection are known in the art and any such known method may beused. A non-limiting example of a Raman detection unit of use isdisclosed in U.S. Pat. No. 6,002,471. In this embodiment of theinvention, the excitation beam is generated by either a Nd:YAG laser at532 nm wavelength or a Ti:sapphire laser at 365 nm wavelength. Pulsedlaser beams or continuous laser beams may be used. The excitation beampasses through confocal optics and a microscope objective, and isfocused onto the nanochannel or microchannel containing packednanoparticles. The Raman emission light from the macromolecule iscollected by the microscope objective and the confocal optics and iscoupled to a monochromonator for spectral dissociation. The confocaloptics includes a combination of dichroic filters, barrier filters,confocal pinholes, lenses, and mirrors for reducing the backgroundsignal. Standard full field optics can be used as well as confocaloptics. The Raman emission signal may be detected by a Raman detector.The detector includes an avalanche photodiode interfaced with a computerfor counting and digitization of the signal.

Alternative examples of detection units are disclosed, for example, inU.S. Pat. No. 5,306,403, including a Spex Model 1403 double-gratingspectrophotometer equipped with a gallium-arsenide (GaAs)photomultiplier tube (RCA Model C31034 or Burle Industries ModelC3103402) operated in the single-photon counting mode. The excitationsource is a 514.5 nm line argon-ion laser from SpectraPhysics, Model166, and a 647.1 nm line of a krypton-ion laser (Innova 70, Coherent).

Alternative excitation sources include a nitrogen laser (Laser ScienceInc.) at 337 nm and a helium-cadmium laser (Liconox) at 325 nm (U.S.Pat. No. 6,174,677). The excitation beam may be spectrally purified witha bandpass filter (Corion) and may be focused on a nanochannel ormicrochannel using a 6× objective lens (Newport, Model L6X). Theobjective lens may be used to both excite the molecule of interest andto collect the Raman signal, by using a holographic beam splitter(Kaiser Optical Systems, Inc., Model HB 647-26N18) to produce aright-angle geometry for the excitation beam and the emitted Ramansignal. A holographic notch filter (Kaiser Optical Systems, Inc.) may beused to reduce Rayleigh scattered radiation. Alternative Raman detectorsinclude an ISA HR-320 spectrograph equipped with a red-enhancedintensified charge-coupled device (RE-ICCD) detection system (PrincetonInstruments). Other types of detectors may be used, such as chargedinjection devices, photodiode arrays or phototransistor arrays.

Any suitable form or configuration of Raman spectroscopy or relatedtechniques known in the art may be used for detection of themacromolecules on the uniform surface, including but not limited tonormal Raman scattering, resonance Raman scattering, surface enhancedRaman scattering, surface enhanced resonance Raman scattering, coherentanti-Stokes Raman spectroscopy (CARS), stimulated Raman scattering,inverse Raman spectroscopy, stimulated gain Raman spectroscopy,hyper-Raman scattering, molecular optical laser examiner (MOLE) or Ramanmicroprobe or Raman microscopy or confocal Raman microspectrometry,three-dimensional or scanning Raman, Raman saturation spectroscopy, timeresolved resonance Raman, Raman decoupling spectroscopy or UV-Ramanmicroscopy.

Raman Labels

Certain embodiments may involve attaching a label to the molecule linkedto the nanoparticle surface to facilitate their measurement by a Ramandetector. Non-limiting examples of labels that could be used for Ramanspectroscopy include TRIT (tetramethyl rhodamine isothiol), NBD(7-nitrobenz-2-oxa-1,3-diazole), Texas Red dye, phthalic acid,terephthalic acid, isophthalic acid, cresyl fast violet, cresyl blueviolet, brilliant cresyl blue, para-aminobenzoic acid, erythrosine,biotin, digoxigenin, 5-carboxy-4′,5′-dichloro-2′,7′-dimethoxyfluorescein, 5-carboxy-2′,4′,5′,7′-tetrachlorofluorescein,5-carboxyfluorescein, 5-carboxy rhodamine, 6-carboxyrhodamine,6-carboxytetramethyl amino phthalocyanines, azomethines, cyanines,xanthines, succinylfluoresceins and aminoacridine. These and other Ramanlabels may be obtained from commercial sources (e.g., Molecular Probes,Eugene, Oreg.).

Polycyclic aromatic compounds in general may function as Raman labels,as is known in the art. Other labels that may be of use for particularembodiments include cyanide, thiol, chlorine, bromine, methyl,phosphorus and sulfur. In certain, carbon nanotubes may be of use asRaman labels. Methods of use of labels in Raman spectroscopy are known(e.g., U.S. Pat. Nos. 5,306,403 and 6,174,677).

Micro-Electro-Mechanical Systems (MEMS)

In various embodiments of the invention, uniform nanoparticle substratesmay be incorporated into a larger apparatus and/or system. In certainembodiments, the substrate may be incorporated into amicro-electro-mechanical system (MEMS). MEMS are integrated systemscomprising mechanical elements, sensors, actuators, and electronics. Allof those components may be manufactured by known microfabricationtechniques on a common chip, comprising a silicon-based or equivalentsubstrate (e.g., Voldman et al., Ann. Rev. Biomed. Eng. 1:401-425,1999). The sensor components of MEMS may be used to measure mechanical,thermal, biological, chemical, optical and/or magnetic phenomena. Theelectronics may process the information from the sensors and controlactuator components such pumps, valves, heaters, coolers, filters, etc.thereby controlling the function of the MEMS.

The electronic components of MEMS may be fabricated using integratedcircuit (IC) processes (e.g., CMOS, Bipolar, or BICMOS processes). Theymay be patterned using photolithographic and etching methods known forcomputer chip manufacture. The micromechanical components may befabricated using compatible “micromachining” processes that selectivelyetch away parts of the silicon wafer or add new structural layers toform the mechanical and/or electromechanical components.

Basic techniques in MEMS manufacture include depositing thin films ofmaterial on a substrate, applying a patterned mask on top of the filmsby photolithographic imaging or other known lithographic methods, andselectively etching the films. A thin film may have a thickness in therange of a few nanometers to 100 micrometers. Deposition techniques ofuse may include chemical procedures such as chemical vapor deposition(CVD), electrodeposition, epitaxy and thermal oxidation and physicalprocedures like physical vapor deposition (PVD) and casting. Methods formanufacture of nanoelectromechanical systems may be used for certainembodiments of the invention. (See, e.g., Craighead, Science290:1532-36, 2000.)

In some embodiments of the invention, uniform nanoparticle substratesmay be connected to various fluid filled compartments, such asmicrofluidic channels, nanochannels and/or microchannels. These andother components of the apparatus may be formed as a single unit, forexample in the form of a chip as known in semiconductor chips and/ormicrocapillary or microfluidic chips. Alternatively, the uniformnanoparticle substrates may be removed from a silicon wafer and attachedto other components of an apparatus. Any materials known for use in suchchips may be used in the disclosed apparatus, including silicon, silicondioxide, silicon nitride, polydimethyl siloxane (PDMS),polymethylmethacrylate (PMMA), plastic, glass, quartz, etc.

Techniques for batch fabrication of chips are well known in the fieldsof computer chip manufacture and/or microcapillary chip manufacture.Such chips may be manufactured by any method known in the art, such asby photolithography and etching, laser ablation, injection molding,casting, molecular beam epitaxy, dip-pen nanolithography, chemical vapordeposition (CVD) fabrication, electron beam or focused ion beamtechnology or imprinting techniques. Non-limiting examples includeconventional molding with a flowable, optically clear material such asplastic or glass; photolithography and dry etching of silicon dioxide;electron beam lithography using polymethylmethacrylate resist to patternan aluminum mask on a silicon dioxide substrate, followed by reactiveion etching. Methods for manufacture of nanoelectromechanical systemsmay be used for certain embodiments of the invention. (See, e.g.,Craighead, Science 290:1532-36, 2000.) Various forms of microfabricatedchips are commercially available from, e.g., Caliper Technologies Inc.(Mountain View, Calif.) and ACLARA BioSciences Inc. (Mountain View,Calif.).

In certain embodiments of the invention, part or all of the apparatusmay be selected to be transparent to electromagnetic radiation at theexcitation and emission frequencies used for Raman spectroscopy, such asglass, silicon, quartz or any other optically clear material. Forfluid-filled compartments that may be exposed to various analytes, suchas proteins, peptides, nucleic acids, nucleotides and the like, thesurfaces exposed to such molecules may be modified by coating, forexample to transform a surface from a hydrophobic to a hydrophilicsurface and/or to decrease adsorption of molecules to a surface. Surfacemodification of common chip materials such as glass, silicon, quartzand/or PDMS is known in the art (e.g., U.S. Pat. No. 6,263,286). Suchmodifications may include, but are not limited to, coating withcommercially available capillary coatings (Supelco, Bellafonte, Pa.),silanes with various functional groups such as polyethyleneoxide oracrylamide, or any other coating known in the art.

EXAMPLE

Protocol to Make Au Nanoparticles:

Diblock polymer Polystyrene-block-poly(2-vinylpyridine) may be purchasedfrom Polymer Source, Inc. The polymer is dissolved in hot toluene atapproximately 0.5% wt concentration. 5 mM solutions of HAuCl4 of equalvolume are added with intense stirring of 1 hour to form thegold-polymer complex. A silicon wafer is dipped into the resultingsolution for 5 minutes, and then rinsed with excess cold water twice.The resulting Au-polymer coated wafer is air-dried, and treated withhydrogen-plasma (100 W/1 mbar/10 min). The treated wafer may be used inSERS experiment directly.

Protocol to Test the Au Nanoparticles' SERS Activity:

The SERS measurement was performed on a Raman microscope (Renishaw, UK)equipped with a 514 nm Argon ion laser (25 mW). A Press-to-seal SiliconeIsolators (Grace Biolabes) was fixed on top of the silicon wafer. 10 uLof 1 mM Adenine solution was added to the well, and the laser beam wasfocused on the top surface of the sample while scattering photons werecollected for 10-20 second.

The Expected Results:

The Au nanoparticles produced through micelle-controlled methoddemonstrates strong SERS enhancement activity.

All of the METHODS and APPARATUS disclosed and claimed herein can bemade and used without undue experimentation in light of the presentdisclosure. It will be apparent to those of skill in the art thatvariations may be applied to the METHODS and APPARATUS described hereinwithout departing from the concept, spirit and scope of the claimedsubject matter. More specifically, it will be apparent that certainagents that are both chemically and physiologically related may besubstituted for the agents described herein while the same or similarresults would be achieved. All such similar substitutes andmodifications apparent to those skilled in the art are deemed to bewithin the spirit, scope and concept of the claimed subject matter.

1. A method comprising: creating a plurality of micelles from aplurality of block polymer molecules, the block polymer moleculescomprising ligands; combining the plurality of micelles with one or moreions comprising a metal to form a plurality of micelle-metal ioncomplexes; wherein the ions comprising a metal are located substantiallyin a core of the micelle-metal complexes depositing the plurality ofmicelle-metal ion complexes on a surface; and forming a layer comprisingan array comprising metal nanoparticles without the block polymer andthe ligand by removing the block polymer and the ligand and reducing themetal ions.
 2. The method of claim 1, wherein a single type of ligand isattached to said polymer molecules.
 3. The method of claim 1, whereintwo or more different types of ligands are attached to polymermolecules.
 4. The method of claim 3, wherein the two or more differenttypes of ligands are present in said micelles in a specific ratio. 5.The method of claim 3, further comprising combining the micelles withtwo or more different metal ions.
 6. The method of claim 3, furthercomprising generating a substantially uniform nanoparticle layer on asurface from the micelle-metal ion complexes.
 7. The method of claim 1,wherein the polymer comprises at least one polymer selected from thegroup consisting of polystyrene-poly(4-vinylpyridine),polystyrene-poly(2-vinylpyridine), polystyrene-poly(4-vinylphenol)poly(4-vinylpyridine-co-butyl methacrylate), poly(styrene-co-maleicacid) and poly(vinyl chloride-co-vinyl acetate-comaleic acid).
 8. Themethod of claim 1, wherein the one or more ligand comprise at least oneligand selected from the group consisting of Cl⁻, Br⁻, CN⁻, SCN⁻,sulfate, nitrate, oxalate, p-toluene sulfonate, citrate,tetrachloroaurate (III) (AuCl₄)⁻, Dicyanideagenate (I) (Ag(CN)₂)⁻,hexachloroplatinate (IV) (PtCl₆)²⁻, and tetrahydroxoaluminate (III)[Al(OH)₄]⁻.
 9. The method of claim 1, wherein the one or more metal ionscomprise at least one metal ion selected from the group consisting ofAg⁺, Cu²⁺, Fe³⁺, Al³⁺, Pd²⁺Fe²⁺, Ru³⁺Au⁺, Au³⁺,cyclopentadienyl-iron-tricarbonyl [CpFe(CO)₃]⁺,cyclopentadienyl-rutheniumtricarbonyl [CpRu(CO)₃]⁺, hexachlorostannate(IV) [SnCl₆]²⁻, hexachlororhodate(III) [RhCl₆]³⁻, permolybdate [MoO₄]²⁻,dicyanocuprate(I) ion [Cu(CN)₂]⁻ and perrheniate [ReO₄]⁻.
 10. The methodof claim 9, wherein said surface comprises at least one materialselected from the group consisting of silicon, silicon dioxide, siliconnitride, germanium, Gallium Arsenide (GaAs), Aluminum nitride (AlN) andquartz.
 11. The method of claim 1, wherein the plurality ofmicelle-metal ion complexes are deposited on the surface by dip coatingor spin coating.
 12. The method of claim 1, wherein said block polymermolecules and ligand are removed by exposure to at least one of thefollowing consisting of hydrogen plasma, carbon-tetrafluoride (CF₄),sulfur hexafluoride (SF₆) and oxygen plasma.
 13. The method of claim 1,further comprising using layer comprising an array comprising metalnanoparticles to detect one or more analytes.
 14. The method of claim13, wherein said analytes are detected by Surface Enhanced RamanSpectroscopy (SERS), Surface Enhanced Resonance Raman Spectroscopy(SERRS), or Coherent Anti-stokes Raman Spectroscopy (CARS).
 15. Themethod of claim 1, wherein the density of said one or more metal ions inthe micelle determines the size of the nanoparticle that is generated.16. The method of claim 1, wherein the molecular weight of the polymerattached to the one or more ligand determines the periodicity of thenanoparticles that form the nanoparticle layer.
 17. The method of claim1, wherein the size of the micelle determines the size of nanoparticlesthat form the nanoparticle layer.
 18. The method of claim 1, furthercomprising; generating a uniform nanoparticle layer on a first surfacethat overlays a second surface; and etching the areas of said firstsurface around the nanoparticles to expose said second surface.
 19. Themethod of claim 18, further comprising combining the micelles with twoor more different metal ions.